Mechanisms of Scanning Probe Microscopy in Electro-Optical Analysis

摘要

Scanning probe microscopy is a key technology of nanometer-scale surface analysis, and highly valued among industries and academia. Scanning probe microscopy with atomic resolution can be used to measure the optical, electrical, magnetic, mechanical and many more other properties of the material surface. Near-field scanning optical microscopy breaks through the diffraction limit of conventional optical resolution, and conducting atomic force microscopy provides statistical analysis of surface electrical properties. They are extensively applied in the fields of physics, chemistry, material science and biology. The basic principles, system setup and applications of these two technologies that are upgraded from ordinary atomic force microscopes at ITRC (Instrument Technology Research Center) are introduced in this article.