Fabrication of optical waveguide components based-on embossing and photobleaching using electrooptic polymer film

摘要

Channel waveguide with grating is fabricated in nonlinear optical (NLO) polymer thin films by means of simultaneous embossing and photobleaching. A combined structure of masidmaster consisting of a photomask part and a grating die part which is made of polyimide is fabricated. Then the mask/master is set on the NLO polymer films and both embossing and photo bleaching are performed simultaneously Profiles of the replica grating and the channel waveguide are estimated.