Micro optical mounting technique: high-resolution encoder and micro blood flowmeter

摘要

We have developed an optical passive alignment technique using alignment marks for hybrid integration. The hybrid integration of various optical components (laser diode, photodiode, grating, etc) on a silicon substrate (surface mounting) enables us to construct highly functional, reliable, and low-cost micro-sensors. Using this technique, several micro-sensors, including a high-resolution encoder that can measure the displacement or revolution angle, and a blood flowmeter that can monitor blood flow in human skin, have been developed. Because of their small size (2×3 mm{sup}2) with high performance, these sensors have a great potential for many industrial applications.