Thermally Driven Microvalve Technology Applying Nickel-Silicon Bimorph

摘要

A thermally driven actuator with a large driving force and displacement has been developed by applying semiconductor micromachining technology to a nickel- silicon bimorph. The MEMS micro-valve for gas flow control using the developed actuator has achieved a low driving voltage of 2.7 V and a low power-consumption operation of 200 mW by adopting a unique heat insulation structure consisting of comb-shaped silicon and a polyimide film. The valve uses a chip size of 7.3 mm × 5.8 mm × 1.2 mm and controls a flow rate of 0.05-500 cc/min, and capable of closing the valve against a pressure differential of 46.7 kPa.