Crystallographic orientation effect of seedlayers deposited by ECR sputtering method on Co-Cr-Pt longitudinal recording media

摘要

Crystallographic and magnetic properties are investigated for Co-Cr-Pt/Cr-Ti longitudinal media fabricated on MgO and Cr seedlayers prepared by Electron Cyclotron Resonance (ECR) sputtering method. The MgO and Cr layers deposited at room temperature show well developed {100} texture. Highly (100)oriented Cr-Ti and (11.0)-oriented Co-Cr-Pt layers are epitaxially grown on the seedlayers. The ECR-deposited seedlayers are useful to prepare Co-Cr-Pt media with high coercivity and small crystal grain diameter.