Effect of the sputtering gasses on the magnetostriction of giant magnetostrictive thin films

摘要

We studied the effect of the sputtering gasses on the magnetostriction of giant magnetostrictive thin films. The preparations of giant magnetostrictive thin films were made by dc magnetron sputtering process. Thin films were formed in inert and active gasses. The magnetic and magnetostrictive properties were found changed by sputtering gas pressure.