Dewetting Assisted Patterning of Polystyrene by Soft Lithography to Create Nanotrenches for Nanomaterial Deposition

摘要

Micromolding in capillaries of polystyrene has been carried out using a poly(dimethylsiloxane) stamp, derived from a compact disk (CD) as master, while heating above the glass transition temperature of polystyrene. The resulting pattern contained a replica of the parallel channels but with an important difference that trenches of width ~30 nm were found in between. The nanotrenches in polystyrene could be filled with metals by physical vapor deposition and electroless plating. This method finds potential applications in nanoelectronics and nanofluidics.