Atomic Level Analysis of Surfaces by a Scanning Atom Probe (SAP)

摘要

The structure and unique feature of a scanning atomprobe (SAP) are described. The atomic level mass analysis by theSAP is demonstrated by analyzing the diamonds formed by thechemical vapor deposition (CVD), graphites, vitreous carbon andsilicon microtips fabricated by lithographic process. The analysisrevealed that the CVD diamonds contain a large amount ofhydrogen. Furthermore, a significant difference between the massspectra of the diamonds, graphite and vitreous carbon is noticed.The study also shed light on the oxygen, carbon and fluorinediffusion into the silicon tips immersed in hydrofluoric acid.Applicability of the SAP for the study of corrosion process is discussed.