Formation of Intermetallic Compounds during the Ion-Plasma Sputtering of Metal Films on Diamond

摘要

The morphology of the metal films deposited onto diamond by the ion-plasma method at a temperature of 600°С under vacuum (10_(–2)Pa) are studied by scanning electron microscopy. It is shown that crystalline formations and needle structures are formed on the surface of the films. It is established by X-ray phase analysis that Ni~( m )Ti~( n )compounds are mainly formed.