High sensitivity waveguide micro-displacement sensor based on intermodal interference

摘要

An optical waveguide displacement sensor according to core-cladding modes interference is theoretically proposed and experimentally demonstrated. Ultraviolet sensitive SU-8 polymer on silica is used as the guiding layer. It is covered by a 12 nm thick planar gold grating. The air gap sensing head which consists of the waveguide end and the single-mode fiber facet can realize the displacement detection by monitoring the wavelength dip shifting in transmission spectra. Cladding modes propagating in the exposed SU-8 can be effectively excited by the end-fire coupling because of the mode field mismatch between the SU-8 waveguide and lead-in fiber. A sinusoidal pattern transmission spectrum in C-band with the depth of over 14 dB can be observed due to the interference between the core and cladding modes. Peaks in the transmission spectrum vary continuously with the position offset of input fiber facet from the center of waveguide end. Both the sensitivity and the stability of sensing are enhanced by the introduction of nanometric gold gratings. The fabricated displacement sensor exhibits a high sensitivity of 2.3 nm mu m(-1), promising potentials for micromechanical processing and integrated optics application.