CMOS compatible on-chip telecom-band to mid-infrared supercontinuum generation in dispersion-engineered reverse strip/slot hybrid Si3N4 waveguide

摘要

A silicon nitride (Si3N4)-based reverse strip/slot hybrid waveguide with single vertical silica slot is proposed to acquire extremely low and flat chromatic dispersion profile. This is achieved by design and optimization of the geometrical structural parameters of the reverse hybrid waveguide. The flat dispersion varying between +/- 10 ps/(nm.km) is obtained over 610 nm bandwidth. Both the effective area and nonlinear coefficient of the waveguide across the entire spectral range of interest are investigated. This led to design of an on-chip supercontinuum (SC) source with -30 dB bandwidth of 2996 nm covering from 1.209 to 4.205 mu m. Furthermore, we discuss the output signal spectral and temporal characteristic as a function of the pump power. Our waveguide design offers a CMOS compatible, low-cost/high yield (no photolithography or lift-off processes are necessary) on-chip SC source for near- and mid-infrared nonlinear applications.