Development of compact 2.45 GHz ECR ion source for generation of singly charged ions

摘要

2.45 GHz ECR ion sources are widely used for production of single charged heavy ions and secondary radioactive ion beams. This paper describes the development of a compact ECR ion source based on coaxial quarter wave resonator. The first results of extracted current measurements at different resonator configuration as a function of UHF frequency, power and gas flow are presented. At the extraction voltage about of 10 kV and UHF power about of 100 W more than 500 μA of He~+ ions were produced with the extraction hole of 3 mm in diameter that corresponds to the current density of 7.5 mA/cm~2.