Simulation of the Self-Organizing Synthesis of Hybrid Nanostructures in the Chemical Vapor Deposition of Hydrocarbons on a Transition-Metal Catalyst

摘要

A physicochemical model of isothermal synthesis of a graphene–carbon nanotube structure in the process of chemical vapor deposition of hydrocarbons on a transition-metal catalyst and a kinetic model of two-stage formation of a multilayer graphene on such a catalyst with a high carbon solubility in the process of synthesis of the indicated hybrid nanostructure have been developed. The existence of these stages was established. The number of graphene layers and the length of the nanotubes in a graphene–carbon nanotube structure synthesized on a cobalt fi lm in the process of chemical vapor deposition of hydrocarbons on it were calculated depending on the thickness of this fi lm, the temperature of the process, and the hydrocarbon concentration in a gas mixture supplied into a reactor. It is shown that the maximum length of such nanotubes is limited by the thickness of the catalyst fi lm on which they are grown. The models proposed and the results of calculations performed with them can be used for optimization of the conditions of synthesis of hybrid nanostructures in the process of chemical vapor deposition of hydrocarbons on transition metals for the purpose of production of innovation materials and devices as well as for increasing the efficiency of functioning of elements used in microelectronics and nanoelectronics.