Study of soft x-ray optical properties of niobium carbide (NbC) thin film in 6–15?nm wavelength region

摘要

In the present study, the optical constants of niobium carbide (NbC) in soft x-ray wavelength region of 6–15?nm have been determined using angle dependent x-ray reflectivity measurements. Experimentally measured optical constants (δ and β) are compared with tabulated values of Henke et al. The δ values are found 5–30% lower than the bulk value whereas deviation in beta values is around 5–38%. To the best of our knowledge, the present study gives the first reported experimental values of optical constants for niobium carbide in 6–15?nm wavelength range. The knowledge of experimentally measured optical constants of NbC will help in practical calculation of optical devices.