Femtosecond Laser Technology for Solid-State Material Processing: Creation of Functional Surfaces and Selective Modification of Nanoscale Layers

摘要

Information on the rapidly increasing use of modification of solid-state materials surfaces by femtosecond laser pulses at moderate intensities (around 0.1-10 TW/cm(2)) is presented as applied to creation of functional surfaces with tailored thermophysical, hydrodynamic, and mechanical properties and in application to selective modification and removal of nanoscale (1-100 nm) layers of bulk and thin-film multilayer materials. The problems in obtaining functional surfaces with the externally controllable wetting behavior of superhydrophobic surfaces showing a self-cleaning effect and superhydrophilic surfaces with a controlled Leidenfrost temperature, critical heat flux, and heat transfer coefficient are considered for heat-transfer enhancement during the evaporation and boiling of the working fluid. Data on the hardening of the surface layer of structural materials and the synthesis of diamond-like films are given. The methods for the precision selective removal of nanoscale films and surface modification with the formation of subnanoscale structures are considered.