High-sensitivity Silicon Resonant Strain Sensor

摘要

Silicon resonant sensors, which are used in the DPharp series differential pressure transmitter, calculate pressure by measuring the strain of a diaphragm caused by the pressure with a built-in silicon resonant strain gauge. Although this gauge features higher sensitivity than metal foil strain gauges or piezo-resistance type strain gauges, measurement error is caused by temperature when its coefficient of thermal expansion is different from that of objects to be measured. To solve this, we have developed a new sensor by mounting a silicon resonant sensor on a thermal stress compensation structure and by driving the gauge electrostatically, achieving high sensitivity and less power consumption. This sensor delivers excellent affinity with wireless measurement and the Industrial Internet of Things (IIoT).