Selective seed layer patterning of PVD metal stacks by electrochemical screen printing for solar cell applications

摘要

Abstract > A proof of principle for electrochemical screen printing (ESP) as a patterning process for thin metal stacks that can be employed, eg, in interdigitated back contact (IBC) or silicon heterojunction (SHJ) solar cells, is demonstrated. By using the ESP process, a 125?×?125‐mm 2 interdigitated back contact grid was successfully patterned into a 100‐nm physical vapor deposited (PVD) aluminum layer. Optimizations of the ESP process were performed to improve the patterning resolution. Rectangular trenches with a mean width of 36?±?5?μm could be demonstrated on a 100‐nm–thick aluminum layer. Up to now, ESP can be applied to PVD aluminum, copper, or stacks of both materials. Finally, metal stacks of aluminum and copper were structured, which allow a more homogeneous current distribution for the ESP process and additionally for the subsequent copper electroplating because of the second metal layer underneath the layer to be structured. The successful transfer from wafer substrate to polymer foils increases the application options of ESP technology enormously, where the topography of the surface to be structured affects the printing results. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> > 用于电化学丝网印刷原理的证据（ESP）作为可以采用的薄金属堆叠的图案化过程，例如，在互联的背面接触（IBC）或硅杂结（SHJ）太阳能电池中。通过使用ESP过程，125？×125毫米 2 </ sup> 将交叉的后触点栅格成功地图案成100nm物理气相沉积（PVD）铝层。进行ESP过程的优化以提高图案化分辨率。在100nm厚的铝层上可以对平均宽度为36Ω·Δ5Ω·μm的矩形沟槽。到目前为止，ESP可以应用于两种材料的PVD铝，铜或叠层。最后，构造了金属堆叠的铝和铜，其允许ESP过程更均匀的电流分布，并且由于在层下面的第二金属层被构造的第二金属层而另外用于随后的铜电镀。从晶片衬底到聚合物箔的成功转移增加了ESP技术的应用选择，其中构造的表面的形貌影响了印刷结果。 </ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-29870/'>《Progress in photovoltaics》</a> <b style="margin: 0 2px;">|</b><span>2020年第6期</span><b style="margin: 0 2px;">|</b><span>共7页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/7667.html" title="通信系统（传输系统）">通信系统（传输系统）;</a><a href="https://www.zhangqiaokeyan.com/clc/1790.html" title="光电子技术、激光技术">光电子技术、激光技术;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Al/Cu stack&option=203" rel="nofollow">Al/Cu stack;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=electrochemical etching&option=203" rel="nofollow">electrochemical etching;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=flexible circuit board&option=203" rel="nofollow">flexible circuit board;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=interdigitated back contact (IBC) solar cell&option=203" rel="nofollow">interdigitated back contact (IBC) solar cell;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=plating&option=203" rel="nofollow">plating;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=screen printing&option=203" rel="nofollow">screen printing;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=silicon&option=203" rel="nofollow">silicon;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=water‐based printing paste&option=203" rel="nofollow">water‐based printing paste;</a> </p> <div class="translation"> 机译：Al / Cu叠层;电化学蚀刻;柔性电路板;交叉的背面接触（IBC）太阳能电池;电镀;丝网印刷;硅;水性印刷浆料; 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href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=刘国伟&option=202" target="_blank" rel="nofollow" class="tuijian_auth tuijian_authcolor"> . 刘国伟</a> <span> . 2019</span> </span> </div> </li> </ul> <ul style="display: none;"> <li> <div> <b>1. </b><a class="enjiyixqcontent" href="/patent-detail/06120106862484.html">用于对太阳能电池的金属触点形成种子层和随后加固该种子层或该金属触点的光致电化脉冲沉积的方法和用于实现该方法的装置</a> <b>[P]</b> . <span> 中国专利： CN102686784A </span> <span> . 2012-09-19</span> </div> </li> <li> <div> <b>2. </b><a class="enjiyixqcontent" href="/patent-detail/06120100557014.html">用于将材料丝网印刷于用于太阳能电池制造中的基板上的设备、太阳能电池生产设备、以及用于将材料丝网印刷于用于太阳能电池制造中的基板上的方法</a> <b>[P]</b> . <span> 中国专利： CN109195801A </span> <span> . 2019-01-11</span> </div> </li> <li> <div> <b>3. </b><a class="enjiyixqcontent" href="/patent-detail/06130424306294.html">Printing block system for use in screen printing machine for metallization of solar cells, has printing block with openings representing part of metallization pattern, where openings sectionally overlap other openings of another block</a> <b>[P]</b> . <span> 外国专利：  DE102009052647A1 </span> <span> . 2011-05-12</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：用于丝网印刷机中的用于太阳能电池金属化的印刷块系统，其印刷块具有代表金属化图案的一部分的开口，其中开口部分地与另一块的其他开口重叠 </span> </p> </li> <li> <div> <b>4. </b><a class="enjiyixqcontent" href="/patent-detail/06130434149738.html">Process for production of a screen printing pattern from a hardened pattern composition with application of a top layer space selectively by laser radiation</a> <b>[P]</b> . <span> 外国专利：  DE102005023533A1 </span> <span> . 2006-11-23</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：由硬化的图案组合物生产丝网印刷图案的方法，其中通过激光辐射选择性地施加顶层空间 </span> </p> </li> <li> <div> <b>5. </b><a class="enjiyixqcontent" href="/patent-detail/06130416136429.html">Selective removal of coatings from metal layers and their solar cell applications</a> <b>[P]</b> . <span> 外国专利：  JP2015510692A </span> <span> . 2015-04-09</span> </div> <p class="zwjiyix translation" style="max-width: initial;height: auto;word-break: break-all;white-space: initial;text-overflow: initial;overflow: initial;"> <span>机译：从金属层中选择性去除涂层及其在太阳能电池中的应用 </span> </p> </li> </ul> </div> </div> </div> <div class="theme cardcommon" style="overflow: auto;display:none"> <h3 class="all_title" id="enpatent55">相关主题</h3> <ul id="subject"> </ul> </div> </div> </div> </div> <div class="right rightcon"> <div class="details_img cardcommon clearfix" style="margin-bottom: 10px;display:none;" > </div> </div> </div> <div id="thesis_get_original1" class="downloadBth" style="bottom: 19px;z-index: 999;" onclick="ywcd('0704024604904','4',7,2,1,'',this,24)" class="delivery" prompt="010401" title="通过人工服务将文献原文发送至邮箱" >获取原文</div> <div 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