High‐precision alignment procedures for patterning processes in solar cell production

Lohmüller Elmar; Weber Julian; Demant Matthias; Lohmüller Sabrina; Gutscher Simon; Saint‐Cast Pierre; Wolf Andreas

摘要

Abstract >We present two approaches for high‐accuracy aligning of patterning processes with each other when fabricating solar cells. We introduce the approaches on the example of two different patterning processes of which one is adjustable (laser process) and one is not adjustable (screen‐printing process). The basic idea is to measure the coordinates of the applied structures of each involved patterning process at discrete grid points with respect to a reference coordinate system. We chose the grid points such that they completely define the final cell pattern. Then, we adjust the grid point coordinates of one of the patterning processes (the laser process) according to the pattern of the other process (the screen‐printing process). The laser then performs the patterning by connecting the corrected grid points with each other in the desired direction. We perform the associated high‐precision measurement of the patterns' coordinates by using either a high‐precision offline coordinate measuring machine or a high‐resolution inline camera system with subsequent computer‐based data processing. The latter inline method enables high throughput and is, in turn, of great interest for mass production of solar cells. In this paper, we demonstrate the alignment procedure approaches on “pPassDop” solar cells by adjusting a locally applied laser process to the directly following screen‐printing step. This proof of principle includes both above‐mentioned methods for coordinate determination in separate cell batches. Our innovative alignment procedures so far demonstrated the successful matching of 40‐μm‐wide screen‐printed contact fingers to 70‐μm‐wide laser‐processed lines over the entire area of 6‐inch solar cells. </abstract> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> <div class="translation abstracttxt"> <span class="zhankaihshouqi fivelineshidden" id="abstract"> <span>机译：</span><Abstract Type =“Main”XML：Lang =“en”> <标题类型=“main”>抽象</ title> 我们在制造太阳能电池时，我们提出了两种用于彼此的图案化过程的高精度对准。我们介绍了两个不同的图案化过程的示例的方法，其中一个是可调节的（激光过程），一个是不可调节的（丝网印刷过程）。基本思想是测量相对于参考坐标系的离散网格点的每个涉及图案化过程的所涉及的图案化过程的应用结构的坐标。我们选择了网格点，使得它们完全定义了最终的细胞模式。然后，我们根据其他过程的图案（丝网印刷过程）调整图案化过程之一（激光过程）的网格点坐标。然后，通过在所需方向上将校正的网格点彼此连接，激光器执行图案化。我们通过使用具有随后基于计算机的数据处理的高精度离线坐标测量机或高分辨率内联相机系统来执行模式坐标的相关高精度测量。后者内联方法使得能够高吞吐量，而且反过来对太阳能电池的批量生产感兴趣。在本文中，我们通过将局部应用的激光过程调整到直接跟随丝网印刷步骤，证明了在“PPASSDOP”太阳能电池上的对准过程。该原理证明包括以上坐标测定的上述方法，单独的细胞批次。迄今为止，我们的创新对齐程序展示了40微米宽的屏幕印刷的接触手指在6英寸太阳能电池的整个面积上成功匹配了40微米宽的屏幕印刷的接触手指到70微米的激光加工线。</ p> </摘要> </span> <span class="z_kbtn z_kbtnclass hoverxs" style="display: none;">展开▼</span> </div> </div> <div class="record"> <h2 class="all_title" id="enpatent33" >著录项</h2> <ul> <li> <span class="lefttit">来源</span> <div style="width: 86%;vertical-align: text-top;display: inline-block;"> <a href='/journal-foreign-29870/'>《Progress in photovoltaics》</a> <b style="margin: 0 2px;">|</b><span>2020年第3期</span><b style="margin: 0 2px;">|</b><span>共11页</span> </div> </li> <li> <div class="author"> <span class="lefttit">作者</span> <p id="fAuthorthree" class="threelineshidden zhankaihshouqi"> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Lohmüller Elmar&option=202" target="_blank" rel="nofollow">Lohmüller Elmar;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Weber Julian&option=202" target="_blank" rel="nofollow">Weber Julian;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Demant Matthias&option=202" target="_blank" rel="nofollow">Demant Matthias;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Lohmüller Sabrina&option=202" target="_blank" rel="nofollow">Lohmüller Sabrina;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Gutscher Simon&option=202" target="_blank" rel="nofollow">Gutscher Simon;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Saint‐Cast Pierre&option=202" target="_blank" rel="nofollow">Saint‐Cast Pierre;</a> <a href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=Wolf Andreas&option=202" target="_blank" rel="nofollow">Wolf Andreas;</a> </p> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zkzz" style="display: none;">展开▼</span> </div> </li> <li> <div style="display: flex;"> <span class="lefttit">作者单位</span> <div style="position: relative;margin-left: 3px;max-width: 639px;"> <div class="threelineshidden zhankaihshouqi" id="fOrgthree"> <p>Division PhotovoltaicsFraunhofer Institute for Solar Energy Systems (ISE)Freiburg Germany;</p> <p>Division PhotovoltaicsFraunhofer Institute for Solar Energy Systems (ISE)Freiburg Germany;</p> <p>Division PhotovoltaicsFraunhofer Institute for Solar Energy Systems (ISE)Freiburg Germany;</p> <p>Division PhotovoltaicsFraunhofer Institute for Solar Energy Systems (ISE)Freiburg Germany;</p> <p>Division PhotovoltaicsFraunhofer Institute for Solar Energy Systems (ISE)Freiburg Germany;</p> <p>Division PhotovoltaicsFraunhofer Institute for Solar Energy Systems (ISE)Freiburg Germany;</p> <p>Division PhotovoltaicsFraunhofer Institute for Solar Energy Systems (ISE)Freiburg Germany;</p> </div> <span class="z_kbtnclass z_kbtnclassall hoverxs" id="zhdw" style="display: none;">展开▼</span> </div> </div> </li> <li > <span class="lefttit">收录信息</span> <span style="width: 86%;vertical-align: text-top;display: inline-block;"></span> </li> <li> <span class="lefttit">原文格式</span> <span>PDF</span> </li> <li> <span class="lefttit">正文语种</span> <span>eng</span> </li> <li> <span class="lefttit">中图分类</span> <span><a href="https://www.zhangqiaokeyan.com/clc/7667.html" title="通信系统（传输系统）">通信系统（传输系统）;</a><a href="https://www.zhangqiaokeyan.com/clc/1790.html" title="光电子技术、激光技术">光电子技术、激光技术;</a></span> </li> <li class="antistop"> <span class="lefttit">关键词</span> <p style="width: 86%;vertical-align: text-top;"> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=alignment&option=203" rel="nofollow">alignment;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=bifacial&option=203" rel="nofollow">bifacial;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=coordinate correction&option=203" rel="nofollow">coordinate correction;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=laser&option=203" rel="nofollow">laser;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=patterning processes&option=203" rel="nofollow">patterning processes;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=PERC&option=203" rel="nofollow">PERC;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=PERL&option=203" rel="nofollow">PERL;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=pPassDop&option=203" rel="nofollow">pPassDop;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=screen printing&option=203" rel="nofollow">screen printing;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=selective emitter&option=203" rel="nofollow">selective emitter;</a> <a style="color: #3E7FEB;" href="/search.html?doctypes=4_5_6_1-0_4-0_1_2_3_7_9&sertext=silicon solar cells&option=203" rel="nofollow">silicon solar cells;</a> </p> <div class="translation"> 机译：对准;双环;坐标校正;激光;图案化过程;PERC;PERL;PPANTDOP;丝网印刷;选择性发射器;硅太阳能电池; </div> 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