Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and nonlinear effects

摘要

In this paper we present and verify the nonlinear simulation of an aspherical adaptive lens based on a piezo-glass sandwich membrane with combined bending and buckling actuation. To predict the full nonlinear piezoelectric behavior, we measured the nonlinear charge coefficient, hysteresis and creep effects of the piezo material and inserted them into the ELM model using a virtual electric field. We further included and discussed the fabrication parameters-glue layers and thermal stress-and their variations. To verify our simulations, we fabricated and measured a set of lenses with different geometries, where we found good agreement and show that their qualitative behavior is also well described by a simple analytical model. We finally discuss the effects of the geometry on the electric response and find, e.g. an increased focal power range from +/- 4.5 to +/- 9 m(-1) when changing the aperture from 14 to 10 mm.