Low-temperature Fabrication of ZnO Nanorods Using Chemical Bath Deposition Method for Sensing Application in Display

摘要

The highly-orientated ZnO nanorods were synthesized by chemical bath deposition methods at 95°C. The thicknesses of the aluminum doped ZnO, used as transparent and conductive substrates, were deposited and their optical and electrical properties were compared. The obtained aluminum-doped ZnO films exhibits the comparable properties with ITO substrates, on which the ZnO nanorods were highly vertically grown. The uniformly ZnO nanorods showed the enhanced crystallinity with the growth time increase. The obtained ZnO nanorods are expected for sensing application in displays.