Stress and Deformation Analysis of Piezoresistive Square Diaphragm Nano Pressure Sensor

摘要

Pressure sensors are among the most widely used MEMS product as sensors in commercial and industrial applications. The diaphragm structure, thickness, and dimensions along with the placement, size, and shape of the piezo resistors are important in the process of designing a pressure sensor. This paper presents the design and simulation of the square diaphragm to analysis the deformation and stress of various materials as well as for the different thickness of the diaphragms at low pressure in the range of 0.1 to 1.5 bar. The design of diaphragm is as a 10 μm thick square diaphragm with 800 μm edge length are considered, which were analyzed by using ANSYS 17 software. The results show that deformation and stress reduction as in the increase in the thickness, which is directly related to the performance of the diaphragm. CNT based diaphragm also showed the improved performance of the pressure sensor as compared to the silicon and polysilicon material.