The combination of high-power (or high-average power) lasers and high-speed scanning systems processes large substrates quickly and accurately. High-rate laser microprocessing is becoming a key enabling technology for modern microfabrication and production. Recent high-rate machining technology combines the advantages of high-power lasers and high-speed processing. The primary goal is to bring innovative and well-established laser micromachining processes from the lab to the industry to enhance productivity, processing speed, and throughput. This becomes possible, on the one hand, by recent progress in the development of laser sources supplying hundreds to thousands of watts of laser power with excellent beam quality, as well as high-average-power ultrafast lasers. Ultrafast scan systems, another core feature for high-rate machining, can avoid thermal damage to the substrates, even at high laser powers, by deflecting the laser beams at unprecedented speeds.
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