3D-fibre channels in silicon by electrical breakdown - New opportunities for optical fibre alignment and microfluidics

摘要

Very precise 3D fibre channels are fabricated by defined electrical breakdown in crystalline silicon followed by wet anisotropic etching in KOH: it is an extension of the well-known V-grooves that are already extensively used in fibre assembly. It allows to integrate large 2D-arrays of precisely aligned fibres in {110}-silicon or to adjust four fibres in a pyramid-shaped configuration into {100}-silicon in such a way that they all meet in a single point. The fabrication technology is presented and possible applications are described. (c) 2007 Elsevier GmbH. All rights reserved.