Scalable fabrication of geometry-tunable self-aligned superlattice photonic crystals for spectrum-programmable light trapping

摘要

Superlattice photonic crystals (SPhCs) possess considerable potentials as building blocks for constructing highperformance devices because of their great flexibilities in optical manipulation. From the prospective of practical applications, scalable fabrication of SPhCs with large-area uniformity and precise geometrical controllability has been considered as one prerequisite but still remains a challenge. In this work, we developed an anodic aluminum oxide template-guided approach to realize Ni SPhCs with the maximum area (similar to 500 mm(2)) ever reported. By virtue of the dual-pore self-alignment effect arising from the periodic anodization electric fields, uniform structures over large areas were obtained for Ni SPhCs. Meanwhile, the geometrical parameters for every array of nanopores in terms of pore depth, size, and morphology can be independently controlled due to the sequential pore-opening. Based on the experimental observation about the geometrical dependence of the light absorption for Ni dual-pore SPhCs, we further fabricated Ni SPhCs with simultaneously-shaped nanopores and nanoconcaves, which not only simplified the fabrication process but also achieved omnidirectional stably-strong (similar to 95%) light absorption spectra. Optical simulations elucidated that surface plasmon resonance and cavity resonance are responsible for the strong light trapping. Notably, the fabrication technique is applicable to Ni SPhCs with different periodicities, leading to spectrally programmable light absorption spectra. With Ni SPhCs as solar absorber, the water evaporation efficiency of a solar steam generation system and the open circuit voltage of a solar thermoelectric generator demonstrated 2.3 and 2.5 times improvement, respectively.