An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges

摘要

Precision replication of the diamond tool cutting edge is required for non-destructive tool metrology. This paper presents an ultra-precision tool nanoindentation instrument designed and constructed for replication of the cutting edge of a single point diamond tool onto a selected soft metal workpiece by precisely indenting the tool cutting edge into the workpiece surface. The instrument has the ability to control the indentation depth with a nanometric resolution, enabling the replication of tool cutting edges with high precision. The motion of the diamond tool along the indentation direction is controlled by the piezoelectric actuator of a fast tool servo (FTS). An integrated capacitive sensor of the FTS is employed to detect the displacement of the diamond tool. The soft metal workpiece is attached to an aluminum cantilever whose deflection is monitored by another capacitive sensor, referred to as an outside capacitive sensor. The indentation force and depth can be accurately evaluated from the diamond tool displacement, the cantilever deflection and the cantilever spring constant. Experiments were carried out by replicating the cutting edge of a single point diamond tool with a nose radius of 2.0 mm on a copper workpiece surface. The profile of the replicated tool cutting edge was measured using an atomic force microscope (AFM). The effectiveness of the instrument in precision replication of diamond tool cutting edges is well-verified by the experimental results.