Development of a micromechanical probe-measuring instrument for surface properties characterization

摘要

A new type of micromechanical probe-measuring instrument for the characterization of micromechanical properties and in situ surface topography has been developed. It adopts a load-adding cantilever for surface indentation and a force-sensingcantilever for profile measurement. Both the surface indentation and the profile measurement are made by using the same diamond probe. The deflected displacement of the cantilever is measured by an optical sensor. The piezo-driven precision stage withwide motion range and high resonance frequency is utilized to move the specimen in x and v directions. The effectiveness of this instrument is verified by a test. and the experimental results are presented.