Interferometric measurement of freeform surfaces using irregular subaperture stitching

摘要

Irregular subaperture stitching interferometry (ISSI) is proposed for non-null optical freeform surface testing. Compared with circular and annular subapertures, irregular subapertures have a better performance in matching the locally resolvable interferograms due to the rotational asymmetry of freeform surfaces. A modified multi-aperture simultaneous reverse optimization reconstruction algorithm is employed for the subaperture stitching, allowing not only non-complementary subapertures but also no subaperture overlaps. Numerical simulations with error analyses display the accuracy of our method. Experiments showing the effectiveness of the ISSI are presented by testing a phi 20 mm biconic surface with cross-validation.