Method for probing flexoelectric response of free-standing cantilever beams by nanometric oscillations with nanoindentation technique

摘要

A method for measuring flexoelectric response on free-standing cantilever beams using nanoindentation instrumentation is presented. The general advantages of the method is the use of controlled sub micrometric oscillations, small strain field and the possibility of exploiting the micro and nano capabilities of modern indenters, in order to probe small devices in operando conditions. Moreover, several instrumentation and error sources are discussed and considered prior measurements. Finally, the efficiency of the methodology is confirmed by testing Strontium Titanate (STO) and Hydroxyapatite (HAp) beams, with established flexoelectric response. The results confirm the applicability and accuracy of the method. (C) 2020 Elsevier Ltd. All rights reserved.