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首页> 外文期刊>Materials science in semiconductor processing >Cuprous oxide thin films obtained by dip-coating method using rapid thermal annealing treatments
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Cuprous oxide thin films obtained by dip-coating method using rapid thermal annealing treatments

机译:通过使用快速热退火处理通过浸涂法获得的氧化铜薄膜

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摘要

The transformation of cupric oxide (CuO) into cuprous oxide (Cu2O) thin films by rapid thermal annealing (RTA) treatments is studied. The CuO films were obtained by dip-coating from a precursor solution containing copper (II) acetate. The films are formed of ten coats, where each one was deposited with a withdrawal speed of 8 cm/min and dried in air at 250 degrees C for 5 min; after that, the films were sintered in air at 250 degrees C for 1 h. Under these conditions an average thickness of 240 nm is obtained. The RTA treatments on the CuO films were performed for 10 s with a heating ramp of 5 C/s in vacuum at temperatures (TA) in the 325-450 degrees C range with steps of 25 degrees C. As revealed by X-ray diffraction data, the composition of the polycrystalline films depends upon the applied TA: i) CuO+Cu2O for T-A < 375 degrees C, ii) only Cu2O for T-A = 375 and 400 degrees C, and iii) Cu2O+Cu for TA = 425 degrees C. Some physical properties of Cu2O films are: crystallite size ranging between 6.5 and 8.5 nm, direct forbidden band gap energy of 2.36 eV, and optical transmission around 75% for wavelengths larger than 520 nm. Cu2O films obtained at TA = 400 degrees C are p-type with resistivity of 9.9 x 10(1) Omega-cm, mobility of 0.52 cm(2) V-1 s(-1), and carrier concentration of 1.2 x 10(17) cm(-3). These properties of the RTA obtained Cu2O films make them a good candidate for application in solar cells of transparent conductive oxide (n-type)/Cu2O heterostructure type.
机译:研究了通过快速热退火(RTA)处理的氧化铜(CuO)将氧化铜(CuO)转化为氧化亚铜(Cu2O)薄膜。通过从含铜(II)乙酸铜的前体溶液浸涂获得CuO膜。薄膜由十个涂层形成,其中每一个沉积在8cm / min的撤回速度下沉积,并在250℃下在空气中干燥5分钟;之后,将膜在250℃下在空气中烧结1小时。在这些条件下,获得平均厚度为240nm。 CuO膜上的RTA处理在325-450℃的温度(Ta)的温度下,在325-450℃的温度下进行10秒进行10 s,其步骤为25℃。如X射线衍射所揭示数据,多晶膜的组成取决于施加的Ta:i)CuO + Cu 2 O用于Ta <375℃,II)对于Ta = 375和400℃,和III)Cu 2 O + Cu的Cu 2 O = 425度C. Cu2O薄膜的一些物理性质是:微晶尺寸在6.5和8.5nm之间,直接禁用带隙能量为2.36eV​​,光传输大于520nm的波长约为75%。在Ta = 400℃下获得的Cu2O膜是p型,电阻率为9.9×10(1)ω-cm,0.52cm(2)V-1 s(-1)的迁移率,以及1.2×10的载体浓度( 17)cm(-3)。 RTA获得的Cu 2 O膜的这些性质使其成为透明导电氧化物(n型)/ Cu2O异质结构类型的太阳能电池中的良好候选者。

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