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Long-Term Stability and Reliability of Black Phosphorus Field-Effect Transistors

机译:黑磷场效应晶体管的长期稳定性和可靠性

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摘要

Black phosphorus has been recently suggested as a very promising material for use in 2D field-effect transistors. However, due to its poor stability under ambient conditions, this material has not yet received as much attention as for instance MoS2. We show that the recently demonstrated Al2O3 encapsulation leads to highly stable devices. In particular, we report our long-term study on highly stable black phosphorus field-effect transistors, which show stable device characteristics for at least eight months. This high stability allows us to perform a detailed analysis of their reliability with respect to hysteresis as well as the arguably most important reliability issue in silicon technologies, the bias-temperature instability. We find that the hysteresis in these transistors depends strongly on the sweep rate and temperature. Moreover, the hysteresis dynamics in our devices are reproducible over a long time, which underlines their high reliability. Also, by using detailed physical models for oxide traps developed for Si technologies, we are able to capture the channel electrostatics of the black phosphorus FETs and determine the position of the defect energy band. Finally, we demonstrate that both hysteresis and bias-temperature instabilities are due to thermally activated charge trapping/detrapping by oxide traps and can be reduced if the device is covered by Teflon-AF.
机译:最近,有人建议将黑磷用作2D场效应晶体管中非常有前途的材料。但是,由于其在环境条件下的稳定性差,该材料尚未像MoS2那样受到广泛关注。我们表明,最近证明的Al2O3封装导致高度稳定的设备。特别是,我们报告了对高度稳定的黑磷场效应晶体管的长期研究,该晶体管在至少八个月内都具有稳定的器件特性。这种高稳定性使我们能够对它们的磁滞可靠性以及硅技术中最重要的可靠性问题偏置温度不稳定性进行详细分析。我们发现这些晶体管中的磁滞很大程度上取决于扫描速率和温度。此外,我们的设备中的磁滞动态特性可长时间再现,这突出了它们的高可靠性。此外,通过使用针对Si技术开发的氧化物陷阱的详细物理模型,我们能够捕获黑磷FET的沟道静电并确定缺陷能带的位置。最后,我们证明了磁滞和偏置温度的不稳定性都是由于氧化物陷阱导致的热激活电荷俘获/释放所致,如果器件被铁氟龙-AF覆盖,则可以降低滞后和偏置温度的不稳定性。

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