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Development of a High Precision Edge Alignment System for Touch-Panel Glass Substrates

机译:开发用于触摸屏玻璃基板的高精度边缘对准系统

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摘要

There are two kinds of alignment systems, marked and unmarked. The glass substrate for touch panels is categorized as an unmarked work piece. Vision based glass substrate alignment (GSA) relies on the edge of the glass. Traditional GSA systems compensate first for angular and then for linear error. This reduces alignment accuracy and increases alignment time and edge detection usually takes longer than 10 ms. This study proposes an effortless edge detection method. This method is very simple and can significantly reduce the time taken to detect the edge to about 6 ms using a 1.3 megapixel image. In this study, a floating center idea is used to control the glass substrate on a high precision coplanar XXY alignment stage. According to the method, users can set the rotation center anywhere as long as it is on the working (xy) plane. Tolerance prognosis is also considered in this study to help the operator decide if the substrate is usable or should be rejected. The experimental results show alignment repeatability of the x, y and theta axes to be 1 mu m, 1 mu m, and 5 arcsec, respectively.
机译:有两种对齐系统,标记的和未标记的。用于触摸面板的玻璃基板被归类为未标记的工件。基于视觉的玻璃基板对准(GSA)依赖于玻璃的边缘。传统的GSA系统首先补偿角度误差,然后补偿线性误差。这会降低对准精度并增加对准时间,并且边缘检测通常需要10毫秒以上的时间。这项研究提出了一种轻松的边缘检测方法。此方法非常简单,并且可以使用1.3兆像素的图像将检测边缘所需的时间显着减少到大约6 ms。在这项研究中,采用浮动中心思想在高精度共面XXY对准平台上控制玻璃基板。根据该方法,用户可以在旋转(xy)平面上的任意位置设置旋转中心。在这项研究中还考虑了耐受性预后,以帮助操作员确定底物是否可用或应该被拒绝。实验结果表明,x,y和theta轴的对齐重复性分别为1μm,1μm和5 arcsec。

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