Scanning-Digital Image Correlation for Moving and Temporally Deformed Surfaces in Scanning Imaging Mode

摘要

Background Images from scanning electron microscopes, transmission electron microscopes and atomic force microscopes have been widely used in digital image correlation methods to obtain accurate full-field deformation profiles of tested objects and investigate the object's deformation mechanism. However, because of the raster-scanning imaging mode used in microscopic observation equipment, the images obtained from these instruments can only be used for quasi-static displacement measurements; otherwise, spurious displacements and strains may be introduced into the deformation results if these scanning microscopic images are used directly in general digital image correlation calculations for moving and temporally deformed surfaces. Objective Realizing kinematic parameter and dynamic deformation measurements on a scanning electron microscope platform. Methods Establishing a scanning imaging model of moving and temporally deformed objects that contains motion and deformation equations, a scanning equation and an intensity invariance assumption for small deformations. Then proposing a scanning-digital image correlation (S-DIC) method based on combing the characteristics of the scanning imaging mode with digital image correlation. Results Quantitatively investigating the effects of the spurious displacements and strains introduced when using scanning images to represent moving and temporally deformed surfaces in the measurement results. Numerical simulations verify that the accuracy of the S-DIC method is 10(-2)pix for the displacement, 10(-4)for the strain, 10(-4)pix/s for the velocity and 10(-6)s(-1)for the strain rate. Experiments also show that the proposed S-DIC method is effective. Conclusions: The results of this work demonstrate the utility of S-DIC on the field of microscopic dynamic measurement.