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Numerical investigation of flow field and heat transfer characteristics in a latticework duct with jet cooling structures

机译:喷射冷却结构的晶圆厂管道流场和传热特性的数值研究

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Interaction effects of the latticework duct and jet cooling structures on the flow structure and heat transfer were numerically investigated. The latticework duct included eleven sub-channels both on the top wall and bottom wall. The crossing angle was set as 90 degrees. The jet cooling structures had a curved target surface and seven jet nozzles. The jet cooling structures and latticework duct were connected by three different jet nozzle locations and two different jet nozzle shapes, respectively. In addition, six different mass flow ratios in the jet cooling structures were considered. Results showed that the flow field and heat transfer characteristics were sensitive to the jet nozzle location, shapes and mass flow ratios. When the mass flow ratio was increased in the jet cooling structure, the heat transfer was augmented in the jet cooling structure while it was decreased in the latticework duct. Using the jet nozzle near the turning region, the upward spiral flow and helical flow in the sub-channel of the latticework became weak, corresponding to a low Nusselt number in the latticework duct. However, the heat transfer in the jet cooling structure was enhanced. Furthermore, the circular jet nozzle provided high friction factor and Nusselt number both for the jet cooling structures and latticework duct.
机译:数值研究了Latticework管道和喷射冷却结构对流动结构和热传递的相互作用。拉特动工管道包括顶壁和底壁上的11个子通道。交叉角设定为90度。喷射冷却结构具有弯曲的目标表面和七个喷射喷嘴。喷射冷却结构和晶格制品管道分别通过三个不同喷射喷嘴位置和两种不同喷射喷嘴形状连接。另外,考虑了喷射冷却结构中的六个不同的质量流量比。结果表明,流场和传热特性对喷嘴位置,形状和质量流量比敏感。当在喷射冷却结构中升高质量流量比时,在射流冷却结构中增加热传递,同时在晶格制品管道中降低。在转动区域附近使用喷嘴喷嘴,格子的子通道的向上螺旋流动和螺旋流动变得弱,对应于格子管道中的低泡沫数。然而,提高了喷射冷却结构中的热传递。此外,圆形喷射喷嘴为喷射冷却结构和晶格制品管道提供高摩擦系数和篮板。

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