LASIE: Large Area Spectroscopic Imaging Ellipsometry for Characterizing Multi-Layered Film Structures

摘要

In this investigation, we describe a spectroscopic imaging ellipsometry for large area measurements, named as large area spectroscopic ellipsometry (LASIE). LASIE uses a broadband light source and an imaging spectrometer in order to obtain the spectral-spatial intensity images corresponding to a measurement line of a specimen and it can characterize the 3D multi-film structures with the aid of lateral scanning. Opposed to the typical high resolution imaging ellipsometry with the small field of view (FOT), LASIE uses a low magnification imaging lens to enlarge the measurement area and line profiles of multi-layered film structure can be reconstructed at a single operation based on the operation of the spectroscopic imaging spectrometer. In the experiment, 3- and 4-layered film specimen were measured after the system calibration and the 3D film thickness profiles of all film layers were obtained with 1 nm repeatability.