A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation

摘要

In the present study, a newly proposed mechanical polishing method of single-crystal silicon with nano-structured diamond abrasives fabricated by laser was investigated, using molecular dynamics (MD) simulations. The results were compared to conventional mechanical polishing under the same machining parameters. Polishing forces, atomic displacement, development of hydrostatic and von Mises stresses in the subsurface zone, temperature distribution, and polished surface morphologies during nano-polishing were investigated. An analysis model was also built to explore the subsurface damage mechanism in terms of examining the hydrostatic and shear stress distributions during nano-polishing. The analyses demonstrated that structured abrasives in silicon polishing lead to lower polishing forces, thinner subsurface damage layer, lower hydrostatic stresses, lower defect atom numbers, and less compressive normal stresses. Nevertheless, structured nanoscale abrasive polishing leads to lower material removal rates. Additionally, more Si-II forms from Si-I, when polishing with #-shaped groove abrasive is performed.