Ellipsometry porosimetry (EP): thin film porosimetry by coupling an adsorption setting with an optical measurement, highlights on additional adsorption results

摘要

Ellipsometry porosimetry (EP) is an emerging technique that is well adapted to porous thin films analysis; it is non contact and non destructive. EP tools developed at SOPRA, allows us to obtain adsorption isotherms with many different adsorptives at an ambient temperature. EP leads to the same results as classical adsorption experiments (e.g. porosity, pore size distribution...), but it also has some particular features leading to new information. For instance, our optical setup (Spectroscopic Ellipsometry) allows us to determine the variation of the thickness of the samples during the adsorption experiment. It is also very sensitive to interfaces; it is thus possible to detect a porosity gradient or to study a bi-layer sample and plot the two corresponding adsorption isotherms at the same time (Bourgeois et al. 2004). For porous thin films with a non porous barrier layer deposited on top, it is also possible to study the lateral diffusion phenomenon in the film (see figure below). In this paper, we will demonstrate a part of the different features of EP for adsorption on porous thin films.