Linde LienHwa has announced investments in production of electronic special gases at two Taiwan facilities-octafluorobutane (C4F8) purification and filling facility in Taichung, and hexachlorodisilane (HCDS) transfiSI facility in Taoyuan-to enhance its portfolio to meet growing demand from its Taiwan-based and international clients. Linde LienHwa currently has capacity of over 100 tons of C4F8 per year for use in advanced semiconductor etching processes as well as cleaning production chambers in predominantly older-sized semiconductor tools.
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