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Bio-orthogonal fluorinated resist for biomolecules patterning applications

机译:用于生物分子的生物正交氟化抗蚀剂图案化应用

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The patterning of organic materials on solid substrate surfaces has been demonstrated by several methods, such as photolithography, soft lithography, imprint lithography and ink-jet printing. Fluorinated polymers and solvents provide attractive material systems to develop new patterning approaches, as they are chemically orthogonal to non-fluorinated organic molecules, allowing their efficient incorporation in different devices and systems. Moreover, fluorinated polymers are soluble in hydrofluoroether solvents, benign to biomolecules, and can be properly engineered to enable efficient photolithographic patterning. In this work, we report the development of a new photolithographic process for patterning biomolecules on any kind of surfaces either by physical adsorption or covalent bonding. The photoresist is based on a fluorinated material and hydrofluoroether solvents that have minimum interactions with biomolecules and thus they can be characterized as orthogonal to the biomolecules (bio-orthogonal). In both cases, the creation of patterns with dimensions down to 2 pm was achieved. The implementation of the developed photolithographic procedure for the creation of a multi-protein microarray is demonstrated.
机译:通过几种方法证明了固体基板表面上的有机材料的图案化,例如光刻,软光刻,压印光刻和喷墨印刷。氟化聚合物和溶剂提供有吸引力的材料系统,以开发新的图案化方法,因为它们与非氟化有机分子化学正交,允许其有效地掺入不同的装置和系统。此外,氟化聚合物可溶于氢氟醚溶剂,良性到生物分子,并且可以适当地设计以实现有效的光刻图案化。在这项工作中,我们报告了通过物理吸附或共价键合的任何种类表面上的图案化生物分子的新光刻过程的开发。光致抗蚀剂基于氟化材料和氢氟醚溶剂,其具有与生物分子的最小相互作用,因此它们可以表征为与生物分子(生物正交)的正交。在这两种情况下,实现了下降到下午2点尺寸的模式。证明了用于产生多蛋白微阵列的发育光刻程序的实施。

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