Ultrasonic linear motor using traveling vibration on fine ceramic twin ridges

摘要

The ultrasonic motor has several advantages compared with the electromagnetic motor: low speed, high torque, self-retention force, and silent performance [1] The authors have been investigating the ultrasonic linear motor using the ridge-mode traveling wave [2], The particle motion at the ridge surface is elliptical due to the traveling wave, and the slider can be moved via the friction force of the elliptic motion. The ridge waveguide is suitable for the miniaturization of the ultrasonic linear motor, since a high efficiency of energy confinement can be achieved as the waveguide in the rectangular ridge atop the substrate [3], and it is possible to be mounted on the silicon substrate surface Our previously designed ultrasonic linear motor consisted of a single rectangular aluminum ridge waveguide, a slider and two bolt-clamped Langevin transducers (BLT). The maximum sliding force and speed were 0,17N and 46,8mm/s, respectively The entire configuration was, however, unavoidably large because of employing the BLTs, and yawing and pitching of the slider occurred since the contact condition between the slider and the single ridge was unstable. Here, we propose a novel ultrasonic linear motor using twin-ridge waveguide made of precision ceramic, and its propulsion characteristics are investigated.