Modeling of circular piezoelectric micro ultrasonic transducer using CuAl_(10)Ni_5Fe_4 on ZnO film for sonar applications

摘要

Modeling and theoretical characterization of piezoelectric micro ultrasonic transducer (pMUT) using ZnO film sandwiched between nickel aluminum bronze (CuAl_(10)Ni_5Fe_4) electrodes was reported in this paper. The transducer is targeted to be utilized in sonar applications. Analyses on the model were carried out using finite element method. Model's dimensional parameters were optimized for desired performance. Simplified technique was proposed to determine transmit and receive sensitivities of the model. As the result, micro ultrasonic transducer model with resonance frequency of 40 kHz was proposed with estimated receive and transmit sensitivities of -93 dB re 1 V/μPa and 137 dB re 1 μPa/V, respectively. Further model validations require actual device fabrication and this will be included in our future works.