Development of Amorphous SIZO/Ag/Amorphous SIZO Multilayer for High-Performance Transparent Conducting Electrode by Controlling Ag Layer Thickness

摘要

A multilayered transparent conductive film of amorphous SiInZnO/Ag/amorphous SiInZnO (SIZO/Ag/SIZO) was fabricated and characterized. The electrical and optical properties of the multilayers changed with changes in the Ag film thickness. The electrodes with the optimized thickness showed an excellent average transmittance (T-av) of 94.04% and a high figure of merit (FOM) of 38.1 x 10(-3) Omega(-1). As the Ag layer thickness increased over 9 nm, the FOM and sheet resistance decreased. This result could be attributed to the decrease in Tav due to light absorption and reflection from the thick Ag layer.