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Thickness-Dependent Resistive Switching Behavior of KCu7S4/CuxO/Au Device

机译:KCU7S4 / Cuxo / AU设备的厚度依赖性电阻切换行为

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We report the fabrication of KCu7S4/CuxO/Au devices with interfacial CuxO layers of different thicknesses through the spontaneous oxidation of Cu film during deposition. Deposition was conducted with an electron-beam evaporation system under the deposition rate and the chamber pressure of 0.1 angstrom s(-1) and 9.8 x 10(-3) Pa, respectively. X-ray diffraction and X-ray photoelectron spectroscopy characterizations reveal that the interfacial CuxO layers mostly comprise Cu2O and CuO. Electrical characterization reveals that the devices exhibit remarkably thickness-dependent resistive switching behavior. After undergoing an electroforming process under a high compliant current of 1000 mu A, the KCu7S4/16 nm CuxO/Au device exhibits stable bipolar resistive switching behavior with the set voltage of 0.58 V and reset voltage of -0.21 V, whereas the KCu7S4/32 nm CuxO/Au device only shows a hysteresis loop in the forward voltage regime. These findings are ascribed to the existence of high-insulation CuO, which is difficult to be softly broken down. Therefore, the depositional condition of Cu film and the thickness of the interfacial layer should be appropriately controlled for the effective performance of devices with Cu electrodes. The results may also provide guidance for the improvement of the performance and stability of Cu-based nonvolatile memory devices.
机译:我们通过在沉积期间通过Cu膜的自发氧化来报告KCU7S4 / CUXO / AU器件的制造,其具有不同厚度的不同厚度的界面的CUXO层。在沉积速率下用电子束蒸发系统和0.1埃(-1)和9.8×10(-3)PA的腔室压力进行沉积。 X射线衍射和X射线光电子能谱表现揭示了界面杂环层主要包括Cu2O和CuO。电学表征揭示了器件表现出显着的厚度依赖性电阻切换行为。在高于1000μma的高柔顺电流下进行电铸过程后,KCU7S4 / 16NM Cuxo / Au器件具有稳定的双极电阻切换行为,设定电压为0.58 V和-0.21V的复位电压,而KCU7S4 / 32 NM Cuxo / AU设备仅示出了正向电压状态下的滞后环。这些发现归因于存在高绝缘CuO的存在,这难以轻轻地分解。因此,应适当地控制Cu膜的沉积条件和界面层的厚度以用于用Cu电极的有效性能。结果还可以为改善基于Cu的非易失性存储器件的性能和稳定性提供指导。

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