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首页> 外文期刊>Surface & Coatings Technology >Influence of the Al concentration in Ti-Al-B coatings on microstructure and mechanical properties using combinatorial sputtering from a segmented TiB2/AlB2 target
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Influence of the Al concentration in Ti-Al-B coatings on microstructure and mechanical properties using combinatorial sputtering from a segmented TiB2/AlB2 target

机译:三-Al-B涂层中Al浓度对微观结构和机械性能的影响,使用组合溅射从分段TIB2 / ALB2靶

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摘要

A series of (TixAl1-x)B2 +y coatings with compositions in the range of x = 0.01-0.94 and y = 1.70-2.92 has been synthesized using magnetron sputtering from a segmented TiB2/AlB2 target. The coatings are amorphous at x <= 0.05 while a (TixAl1-x)B2+y solid solution forms for x > 0.05. As a consequence of the sputtering process, the B/(Ti + Al) atomic ratio varied with the metal content resulting in the formation of under-stoichiometric coatings at x < 0.35 and over-stoichiometric coatings at x > 0.35. Surplus Al segregates to grain boundaries of the under-stoichiometric coatings whereas the over-stoichiometric coatings have a tissue phase containing mainly B and some Al. The B-rich tissue phase restrains grain growth in the in-plane direction while an increase in Ti content promotes the growth of columnar structured coatings with a pronounced (001) texture up to x = 0.84. The combination of such preferred orientation and tissue phase results in the highest hardness of 39 GPa for the (Ti0.79Al0.21)B-2.70 coating. The Young's modulus, on the other hand, increases continuously from 262 GPa for the most Al-rich coating to 478 GPa for the most Ti-rich coating. Comparing to calculated values of Young's modulus, good agreement is observed for the close to stoichiometric coatings (x = 0.40-0.50). For the off-stoichiometric coatings, the experimental values are lower due to the existence of the tissue phase.
机译:使用来自分段的TIB2 / ALB2靶的磁控溅射合成了一系列(Tixal1-x)B2 + Y涂层,其中组合物在X = 0.01-0.94和Y = 1.70-2.92的范围内。涂层在x <= 0.05时是无定形的,而a(钛合金1-x)b2 + y固体溶液形式为x> 0.05。由于溅射工艺的结果,B /(Ti + Al)原子比随金属含量而变化,导致在X 0.35处的X 0.35和过化学计量涂层的下层化学计量涂层形成。剩余的Al偏见于化学计量涂层的晶界,而过化学计量涂层主要具有含有B和一些Al的组织相。富含B的组织相抑制面内方向上的晶粒生长,同时Ti含量的增加促进柱状结构涂层的生长,具有高达X = 0.84的明显(001)纹理。这种优选取向和组织相的组合导致(TiO 279A10.21)B-2.70涂层的39GPa的最高硬度。另一方面,杨氏模量从262GPA从262个GPA增加到478GPa的最多富含Ti的涂层。比较与杨氏模量的计算值相比,接近化学计量涂层观察到良好的一致性(x = 0.40-0.50)。对于脱离化学计量涂层,由于组织相的存在,实验值较低。

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