Composition analysis of thin films formed on beryllium surfaces under pulsed laser action by the method of chemical thermodynamics

摘要

The thermodynamic approach to determine the phase-chemical composition of thin films formed on the beryllium surface under laser exposure in air and nitrogen gas environments is suggested. Laser marking in a gas environment is used to create contrast patterns on beryllium which is a base material for spherical rotors of the electrostatic gyro. According to thermodynamical calculations of isobaric-isothermal potentials (Gibbs thermodynamic potentials) and kinetic analysis of the chemical reactions, a formation of Be3N2 in nitrogen and BeO in air atmosphere during laser marking of beryllium has the highest probability. As a result, it is possible to control the conductivity of the laser-marked patterns by changing the content and partial pressures of the components of the gas environment. Simulated results agree with the experimental data provided by X-ray diffraction, energy-dispersive X-ray spectroscopy, and scanning probe microscopy (conductivity).