Research on wire-cut electrical discharge machining constant discharge probability pulse power source for silicon crystals

摘要

This study analyzed several disadvantages of the servo control method based on discharge probability detection in wire-cut electrical discharge machining (WEDM) for semiconductor processing. Among these disadvantages is the reduction in machining quality, cutting efficiency, and shape accuracy caused by a change in feed speed. The relationship between pulse width and discharge probability was analyzed to develop a control method based on pulse width proportional-integral-derivative (PID) control. PID adjustment of the pulse width to control discharge probability was applied to achieve constant discharge probability processing. A constant discharge probability pulse power source for WEDM was designed and constructed and subsequently applied to ordinary WEDM machines. Straight line and arc cutting experiments were carried out to prove the feasibility of the new system. The feasibility of the proposed system was verified by conducting straight line and arc cutting experiments. Process parameters were then optimized through the target probability experiment.