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A review of our recent work on Raman scattering and a tribute to K. S. Krishnan

机译:回顾我们最近关于拉曼散射的工作,并向K. S. Krishnan致敬

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Raman scattering was discovered in India by Raman and Krishnan in 1928, After 70 years of the discovery, there is still an intense activity in this field world wide. Though a large body of experimental and theoretical work exists on the subject, there are many experimental situations where it is difficult to interpret the observed Raman spectra, One such example is the Raman scattering from in-homogeneously strained semiconductors, In modern integrated circuit chips and heterostructure devices, the stress varies on a length scale of a few nanometer, Typically, diameter of a focused laser beam is similar to l mu m and penetration depth can vary from a few microns to several millimeters, The laser beam samples a large volume of the strained structure. Each point in this volume scatters light with a Raman frequency characteristic of stress at that point, Because the beam is usually focused, the distribution of light intensity in this volume is very complex, The interpretation of observed Raman spectra is therefore very difficult, Recently we have developed a method to calculate theoretically the Raman spectra from such structures. We used Finite Element Method to calculate the stress and strain tensors, We solved the secular equation numerically to obtain Raman frequencies as a function of stress components. We constructed an expression for the distribution of intensity of light inside the semiconductor taking into account the depth at which the beam is focused. We calculated spectra from closely spaced points in the volume sampled by the laser light. We then superposed all these spectra to obtain the spectrum that will be observed in an experiment. Contrary to the usual belief that light penetrates only up to a depth = I/alpha (where a is the absorption coefficient), we found that the light scattered from much larger depths modifies the Raman spectrum. The calculated spectra agree with the observed spectra from quantum wires, from structures used in local oxidation of Si needed for fabricating IC chips and from other heterostructure devices. A brief review of this work is given in this paper. [References: 26]
机译:拉曼散射是由拉曼和克里希南于1928年在印度发现的。经过70年的发现,该领域在全世界范围内仍活跃着。尽管在该主题上进行了大量的实验和理论研究,但在许多实验情况下,难以解释观察到的拉曼光谱,其中一个例子是来自非均匀应变半导体,现代集成电路芯片和半导体中的拉曼散射。在异质结构器件中,应力在几纳米的长度范围内变化。通常,聚焦激光束的直径类似于1微米,穿透深度可以在几微米到几毫米之间变化。应变的结构。该体积中的每个点都会散射具有该点应力的拉曼频率特征的光,因为光束通常是聚焦的,所以该体积中的光强度分布非常复杂,因此很难对观察到的拉曼光谱进行解释。已经开发了一种理论上从这种结构计算拉曼光谱的方法。我们使用有限元方法来计算应力和应变张量,我们通过数值求解世俗方程来获得拉曼频率作为应力分量的函数。考虑到光束聚焦的深度,我们构造了一个表示半导体内部光强度分布的表达式。我们从激光采样的体积中紧密间隔的点计算光谱。然后,我们将所有这些光谱叠加在一起,以获得将在实验中观察到的光谱。与通常认为光只能穿透深度= I / alpha(其中a是吸收系数)的通常看法相反,我们发现从更大深度散射的光会修改拉曼光谱。计算出的光谱与从量子线,制造IC芯片所需的Si局部氧化所使用的结构以及其他异质结构器件中观察到的光谱一致。本文对这项工作进行了简要回顾。 [参考:26]

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