Modification of electromagnetic fields and plasma resistance by thermal effects in helicon plasmas

摘要

The effects of the thermal motion of charged particles on physical characteristics of collisional helicon plasmas are investigated. First, the dielectric permittivity tensor of a helicon plasma is obtained by considering the thermal and collisional effects in the kinetic theory. Then, the electromagnetic wave and plasma resistance equations are presented and solved in a helicon plasma source with a Nagoya type III antenna. It is shown that by increasing the temperature of plasma electrons, the effective collision frequency is increased, and consequently, the peaks of resistance profiles are lowered and broadened.