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Writing arbitrary distributions of radiant exposure by scanning a single illuminated spatially random screen

机译:通过扫描单个照明的空间随机屏来编写辐射曝光的任意分布

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摘要

Arbitrary distributions of radiant exposure may be written by transversely scanning a single known spatially random screen that is normally illuminated by spatially but not necessarily temporally uniform radiation ormatter wave fields. The arbitrariness of the written pattern of radiant exposure holds up to both a spatial resolution that is dictated by the characteristic transverse length scale of the illuminated spatially random screen and a background term that grows linearly with the number of random-illumination patterns. Two classes of the method are developed. One assumes the distance between the illuminated random mask and the target plane to be sufficiently small that the effects of diffraction may be neglected. The other accounts for the effects of Fresnel diffraction in the regime of large Fresnel number. Numerical simulations are provided for both variants of the method. Contrast and the signal-to-noise ratio are also considered. The method may be parallelized and is suited to both magnifying and demagnifying geometries. Possible applications include spatial light modulators and intensity projectors for those matter and radiation wave fields for which such devices do not exist, printing or microfabrication in both two and three spatial dimensions, and lithography.
机译:可以通过横向扫描通常通过空间而不是一定是时间均匀的辐射或辐射或者辐射或辐射的辐射场,通过横向扫描通常被照射的单个已知的空间随机屏幕来写入辐射曝光的任意分布。辐射曝光的书面图案的任意性占据了空间分辨率,所述空间分辨率都被照明的空间随机屏幕的特征横向长度和与随机照明模式的数量线性增长的背景术语决定的空间分辨率。开发了两种方法。假设照明随机掩模和目标平面之间的距离足够小,以便可以忽略衍射的效果。另一个占菲涅耳衍射在大菲涅耳数量中的影响。为这两种变体提供了数值模拟。对比度和信噪比也被考虑。该方法可以是平行化的并且适于放大和脱磁几何形状。可能的应用包括用于那些物品和辐射波场的空间光调制器和强度投影仪,其这些装置在两个和三个空间尺寸和光刻中不存在这种装置,并且在两个和三个空间尺寸和光刻中。

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