Design and test of a micromachined resonant accelerometer with high scale factor and low noise

摘要

Highlights?The MRA’s scale factor is analyzed and increased from 66.30Hz/g to 244.15Hz/g.?Frequency noises associated with the resonator vibration amplitude are analyzed.?The prototype’s noise and resolution are 0.38μg/Hzand 0.63μg, respectively.AbstractThis paper describes the design, fabrication and experimental evaluation of a silicon micromachined resonant accelerometer that demonstrates high sensitivity and low noise. The device is fabricated with the silicon-on-glass micromachining technology and vacuum packaged to permit the double-ended-tuning-fork resonators operated at extremely high quality factor, up to 3.5×105. Structure optimization of the one-stage micro-lever, resonator and bearing beam is