Two dimensional wavefront retrieval using lateral shearing interferometry

摘要

A new zonal two-dimensional method for wavefront retrieval from a surface under test using lateral shearing interferometry is presented. A modified Saunders method and phase shifting techniques are combined to generate a method for wavefront reconstruction. The result is a wavefront with an error below 0.7 lambda and without any global high frequency filtering. A zonal analysis over square cells along the surfaces is made, obtaining a polynomial expression for the wavefront deformations over each cell. The main advantage of this method over previously published methods is that a global filtering of high spatial frequencies is not present. Thus, a global smoothing of the wavefront deformations is avoided, allowing the detection of deformations with relatively small extensions, that is, with high spatial frequencies. Additionally, local curvature and low order aberration coefficients are obtained in each cell.